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Technical features

Compressed Sensing (CS) in a serial scanning instrument allows one to collect a fraction of the pixel density, often >80% sparse, and faithfully reconstruct the object.

It looks miraculous, but it is statistical science. We have overcome the obstacles preventing CS from being applied to scanning electron microscopy through a combination of novel scan generator hardware and ultra-fast reconstruction algorithms. The result is 10X faster imaging and a concomitant reduction in dose. Applicable to spectroscopies. EDS and Auger, as well as other serial scanning methods such as AFM and even 3D laser scanning microscopy. Extended to 3D, >95% sparsity can be achieved, including application in FIB-SEM 3D reconstruction and IC Autodelayering. The patent-pending CSSG system interfaces with external scan inputs on the microscope in the same manner as an EDS or any other external scan generator. The software interface allows the sparsity to be selected and executes the pattern, data collection and image reconstruction. Features include the ability to acquire automated montage data collection and integrates common microscope control functions. 4X independent simultaneous DAC channels. Both X-Y scan pairs are completely independent and have the ability to operate simultaneously at full speed. This functionality allows for simultaneous and independent scanning of, for instance, an electron column and the ion column to simultaneously collect secondary ions and backscatter electrons. Alternatively, up to four deflection coils on a single column may be controlled independently and simultaneously. 8x 12-bit ADC operating @ 50MHz. This allows for significant oversampling to increase SNR. Each of the 8 analogue inputs use Low Voltage Differential Signaling. Multiple detectors of single type may be combined (i.e., multiple backscatter detectors, multiple SE detectors. Alternatively, the ADCs may be used to collect electrical probe signals, all synchronized with the scanning probe. FPGA acts as a 50MHz “data pipe”. This bi-directional high-speed data pipe not only synchronizes the probe scanning with ADC signals, but allows programmable control through the GPIOs. A foundation for computationally guided microscopy experiments. 3D electron Photogrammetry. We pioneered methods of 3D surface reconstruction using the electron microscope. With our CSSG we can acquire hundreds of images 10X faster to enable high-resolution nanoscale 3D models generated in the scanning electron microscope.